|
A German research institute based has developed a micromechanic sensor for the fabrication quality control of complex micro- and nanoparts. The sensor enables the user to measure the size, form, position and roughness even on vertical surfaces of midget structures. The institute is searching for licensees.
The patented micromechanic sensor, developed by a German
research institute for the fabrication quality control of complex micro- and nanoparts is based on
the optical detection of the displacement cantilevers, which are common in atomic force microscopy.
The new solution offers advantages compared to current measuring equipment and microscopes which are
used for the detection of lateral structures and nanostructures on planar surfaces. So far, precise
measurements of rough surfaces, structures with a high aspect ratio or vertical surface could not be
realised.
The sensor offers an assembly similar to atomic force microscopes, consisting of a
horizontal bending beam with an secondary attached vertical sensor shaft which holds the sensor.
When the measured object is touched, the resulting movement of the cantilever and the changes of the
sensor oscillation are collected optical. The lateral resolution of the sensor system is very high
due to the small radius of the sensor of approximately 20 nanometres. Scratches in sensible surface
are prevented by the low tracking force of less than 0,01 µN.
The entire system consists of
commercialized micro-components from mass production. The assembly can be modified for different
measuring tasks. Yet a precision of 1 nm is achieved in the measurement of micro gear wheels and
borderlines of conducting parts. In near future tests with a star shaped sensor are planned, which
will lead to capability of 3D measuring.
Innovative Aspects:
- The capability of measuring micro
and nanostructures of rough surfaces, structures with a high aspect ration or vertical surfaces;
-
The lateral resolution of the sensor system is very high;
- Scratches in the surface of the measured
objects are prevented;
- The system is assembled of commercialized micro-components;
- A standard
deviation of 1 nm is achieved.
Stage of
Development
Available for demonstration - field tested
Exploitation of RTD Results
None
IPR
Patent(s) granted
Company Details
Type: Research
institute/University
Size: 250-500
Collaboration Type
- Type of partner sought: Industry.
- Specific area of activity of the partner:
Production of measuring devices (in particular for complex micro and nano parts).
- Task to be performed: Production and marketing of the offered system as licensee.
|
