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A research institute based in Lower Saxony, Germany, developed a process for the production of high precision geometry standards. The new geometry standards enable the user to determine scaling factors and characteristics of guidance and positioning of microscopes and coordinate measuring equipment. The research institute is searching for licensees.
The new process developed by a research institute based in
Lower Saxony enables the production of geometry standards with a size in the millimetre range and a
roughness of the surface in a range of less than one nanometre.
Common geometry standards are
produced by erosion and have a roughness of several 100 nanometres, therefore a great improvement of
the precision is achieved. The micro standards are produced on the base of a monocrystalline
silicium, the roughness of the vertical and horizontal surfaces are unsurpassed. Using lithography
processing technology structured wafers are produced, get positioned to multilayers and finally get
bonded. The geometry standards are high precision inverted pyramids, openings or specimen with
undercut.
The produced specimen enable the calibration of coordinate measuring equipment used in
microsystems technology like the measurement of the surface quality of injection nozzles and gear
wheels.
Innovative Aspects:
The process offers the following advantages:
- Surface roughness of
less than one nanometre,
- high precision of production at low production costs,
- bulk-production
possible.
Stage of Development
Available for demonstration - field tested
Exploitation of RTD Results
None
IPR
Patent(s) granted
Company Details
Type: Research institute/University
Size: 250-500
Collaboration Type
- Type of partner sought:
Industry.
- Specific area of activity of the partner:
Production of measuring equipment and specimens.
- Task to be performed:
Use the offered process as licensee.
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