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A research institute from Germany has improved the process for the mechanical characterisation of small material volumes by instrumented testing in the nanoscale. The patented process is based on the simultaneous measurement of test load and penetration depth, the resolution of the test load reaches nN, the resolution of the penetration depth even 1 nanometre or less. The research institute is searching for licensees.
Current progress in nanotechnology increased the interest
in improvements of the measurement processes for the characterisation of mechanical properties of
small volumes of materials. The instrumented penetrant testing in nanoscale of materials as a basic
principle, testing process and data analysis has been a widely established process in research for
several years. The process is often used for the determination of elastic and ductile properties of
ultrathin layers with a thickness between 10 nm and 1 µm for applications in optics,
microelectronics, tools and micro system components.
The developed next generation of penetrant
testing in nanoscale by the German research institute offers improved resolution of the
simultaneously measured values for the penetration depth and the test load.
As the main component,
the load is delivered by an electrostatic comb-drive which generates the test load in high
resolution. The system is equipped with a lateral comb-drive which generates the vertical movement
of the test body which penetrates the tested probe. The lateral drive generates the continuously
raising test load and also measures the achieved penetration depth. A second transversally
positioned comb-drive is mounted to scan the topography of the surface and the generated mark, as
integrated one-dimensional scanning mechanism.
The attached picture shows the assembled indentor,
which is based on a micromechanical system.
Innovative Aspects:
The offered nano indentor has
several advantages compared with common instrumented penetrant testing in nanoscale:
- the
structure of the micromechanical system increases the precision of the measurement,
- the system
fits the needs for measuring the thickness of nano- and microlayers,
- has very small dimensions,
-
and is also applicable on-site.
Stage of
Development
Available for demonstration - field tested
Exploitation of RTD Results
None
IPR
Patent(s) granted
Company Details
Type: Research
institute/University
Size: 250-500
Collaboration Type
- Type of partner sought: Industry, research.
- Specific area of activity of the partner:
Companies or research institutes active in instrumented penetrant testing in nanoscale, optics, microelectronics, tools and micro system components.
- Task to be performed:
Use or market the offered system under licence.
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