|
A German research institute active in metrology has developed a sensor with a specific form for the measurement of surfaces with characteristics like undercut structures or deep holes (large aspect ratio). Conventional sensors or optical processes are not applicable for the measurement of such complex surface geometries. The research institute is searching for licensees.
The newly developed nanosensor which is already in use at
a German research institute, enables the user to measure complex surface geometries like undercut
structures and deep holes.
The body of the convex nanosensor which is produced with a reward
oriented undercut is connected to a cantilever. The undercut enables the scanning of complex surface
geometries. The sensor bodies can be produced by a specific wet-chemical process from materials with
piezoelectronic properties.
This kind of sensor enables the measurement of deformations of the
spike and therefore the acting force. By attaching additional wires with connected electrostatic
potentials to the sensor spike the roughness of scanned surface can also get inspected.
Innovative
Aspects:
The sensor enables the scanning of complex structures with high aspect ratios, while
conventional sensors or optical processes are not capable to measure such structures.
The advantages
of the undercut sensor are the capabilities to measure:
- deep holes and undercut structures,
- in
drill holes and small tubes,
- additionally the roughness of the surface,
- the deformation of the
sensor spike.
Stage of Development
Available for demonstration - field tested
Exploitation of RTD Results
None
IPR
Patent(s) granted
Company Details
Type: Research institute/University
Size: 250-500
Collaboration Type
- Type of partner sought:
Industry
- Specific area of activity of the partner:
Sensor systems, scanning probe microscopy, nanotechnology.
- Task to be performed:
Use or market the offered solution as licensee.
|
